J. Wang and S. Guo
Micro-operation, biotechnology, micro-mechanism, piezo actuator, parallel robot
There is an urgent need for nano-level teleoperation systems to carry out three-dimensional high-speed micromanipulations for medical and biotechnological applications. The authors have designed a precision parallel micro-mechanism driven by piezo actuators (PZT) for use as an operating robot with six degrees of freedom, maximum movement of 18 to 28 µm, and a resolution of 8 to 25 nm. Here, they present the conceptual design, synthesis, and control strategy along with an evaluation of the precision parallel micro-mechanism of this system. The experimental results indicate that the developed parallel micro-mechanism can be used to manipulate micro-objects at high speed and with a high degree of precision.
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