Chupeng Zhang, Jie Zhang, Shijie Zhao, Yi Li, and Daode Zhang


  1. [1] H. Yang, New progress of precision ultra-precision machiningtechnology (Beijing: Aviation Industry Press, 2016).
  2. [2] Z.J. Yuan, X.K. Wang, Precision ultra-precision machiningtechnology, 3rd ed[M]. (China, Machinery Industry Press,Beijing, 2016).
  3. [3] F.N. Yu and S.Y. Xu, Applied to planar reflector precision Φ300mm two-dimensional turntable shaft system design, OpticalPrecision Engineering, 28(05), 2020, 1075–1082.
  4. [4] G. Khim and C.H. Park, A rotary stage in a vacuum using anair bearing, Vacuum, 105, 2014, 39–45.
  5. [5] Y.W. Sun, Q.J.Yang, Y. Cao, et al., Research status of precisionstability of ultra-precision micro and small compositemachiningmachine tools, Manufacturing Technology and Machine Tools,1, 2019, 53–57.
  6. [6] G. Qiang, W.Q. Chen, L.H. Lu, D.H. Huo, and K. Cheng,Aerostatic bearings design and analysis with the applicationto precision engineering: State-of-the-art and futureperspectives, Tribology International, 135, 2019, 1–17,doi:10.1016/j.triboint.2019.02.020.
  7. [7] R.W. An, T.M. Wang, L.J. Tan, et al., Calculation analysisand research on bearing capacity of static pressure rotary tableof heavy CNC machine tools, Internal Combustion enginesand Accessories, 000(011), 2019, 47–49.
  8. [8] C.P. Zhang, H.Y. Zhao, R.Q. Xie, et al., Effect of motionaccuracy on material removal during the CMP process forlarge-aperture plane optics, International Journal of AdvancedManufacturing Technology, 94(1–4), 2018, 105–119.
  9. [9] L.J. Da Silva, T.H. Panzera, L.M. Vieira, J.G. Duduch, C.R.Bowen, and J.C. Campos Rubio, Carbon nanotubes and superplasticizer reinforcing cementitious composite for aerostaticporous bearing. Proceedings of the Institution of MechanicalEngineers, Part J: Journal of Engineering Tribology, 231(11),2017, 1397–1407. doi:10.1177/1350650117696388
  10. [10] H. Jannsen, S. Klein, and B. Nestler, An adjustable flowrestrictor for implantable infusion pumps based on porousceramics, Biomedical Engineering/Biomedizinische Technik,60(4), 2015, 359–364. doi:10.1515/bmt-2015-0072
  11. [11] C.P. Zhang, H.Y. Zhao, X.L. Zhu et al., Design of an ultraprecisioncomputerized numerical control chemical mechanicalpolishing machine and its implementation, Optical Engineering,57(1), 2018, 015104.
  12. [12] C.D. Hao, J.G. Ding, H.H. Ni, et al., Molecular dynamicssimulation of radial gas film stiffness for aerostatic spindlesystem of ultra-precision machining machine tools, Journal ofNanjing University of Science and Technology, 42(219(02)),2018, 14–19.
  13. [13] Z. Huang, Z.J. Jia, T. Deng, et al., Thermal error compensationof static pressure turntable based on support vector machine,Journal of Zhejiang University (Engineering Science), 53(8),2019, 1594–1601.
  14. [14] Y.M. Alsayed, A.A. Abouelsoud, and A.M.R. Fath El Bab,Intelligent position control of shape memory alloy helical springactuator, Mechatronic Systems and Control, 48(2), 2020, 30–36.
  15. [15] A. Frih, Z. Chalh, and M. Mrabti, Wind turbine: Bond graphmodelling and sliding mode control, Mechatronic Systems andControl, 46(1), 2018, 2803–2835.

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