DEVELOPMENT OF 1,700 MM-DIAMETER AEROSTATIC ROTARY TABLE

Chupeng Zhang,∗ Jie Zhang,∗ Shijie Zhao,∗∗ Yi Li,∗ and Daode Zhang∗

Keywords

Aerostatic rotary table, porous restrictor, rapid polishing, largediameter, ultraprecision machining

Abstract

To meet the development needs of large-aperture ultra-precision machining equipment, this article proposes a design scheme of an I-shaped large-diameter aerostatic rotary table, and carries out statics analysis, modal analysis, and restrictor bearing characteristics experiments on the rotary table. The lightweight and structural optimizations of the rotary table were carried out according to the analysis results, and also the process of key components was optimized. The large-diameter aerostatic rotary table with a table size of Φ1,700 mm and axial radial runout less than ±1µm was developed.

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