MECHATRONIC SYSTEM BASED ON THE MICRO-MACRO-KINEMATIC PRINCIPLE

Alexej Janz, Christian Pape, and Eduard Reithmeier

Keywords

Micromacrokinematics, robot, piezo stage, control system, measurement, micromachining

Abstract

The main goal of the project, which is currently running at the Institute of Measurement and Automatic Control of Leibniz University of Hannover, is the development and analysis of a robotic system able to manipulate microscopic objects with the accuracy of 1–2 μm in a 3D workspace of 1 cm3. This system is based on the so-called micro-macro-kinematic principle, which consists in the enhancement of a serial robot with a lower accuracy with the help of a piezoelectric system with a higher accuracy and an external three-dimensional measurement system. A deviation of the robot end-effector position can be measured with the help of the external measurement system and corrected by means of the piezoelectric positioning system.

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