Alexej Janz, Christian Pape, and Eduard Reithmeier
Micro-macro-kinematics, robot, piezo stage, control system, measurement, micro-machining
The main goal of the project, which is currently running at the Institute of Measurement and Automatic Control of Leibniz University of Hannover, is the development and analysis of a robotic system able to manipulate microscopic objects with the accuracy of 1–2 μm in a 3D workspace of 1 cm3. This system is based on the so-called micro-macro-kinematic principle, which consists in the enhancement of a serial robot with a lower accuracy with the help of a piezoelectric system with a higher accuracy and an external three-dimensional measurement system. A deviation of the robot end-effector position can be measured with the help of the external measurement system and corrected by means of the piezoelectric positioning system.
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