V.P. Kiryanov (Russia)
Phase-statistical method, rasters, angle measuring structures.
Features of use of a phase-statistical method are investigated at the inspection of precision scales, rasters, limbs and others angle measuring structures. Opportunities of the separation of contributions from various sources of instabilities carried into the resulting error of the control are discussed. The conclusion is made that the accuracy inspection of manufactured high-precision structures can be made at the level of national flat angle standard in conditions of industrial production.
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