G. Levin, V. Minaev, N. Moiseev, and Ya. Illyushin (Russia)
Nanometer, shifting, image, simulation, interference, and microscope.
The method of determination of the small moving of object in a plane is considered. This method is based on the calculation of the image shifting, got with the use of an optical interferometer. The influence of phase noises of the coherent field structure reconstruction on accura cy of the shifting determination is estimated. The prac tical estimations of the shiftings of the real object is made using data about phase images. Received results are compared with the results of the direct measurings of the object displacements. It is shown ability of regis tration of near-nanometer movings of the object using a serial interference microscope.
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