G.G. Levin, G.N. Vishnyakov, N.N. Moiseev, and V.L. Minaev (Russia)
Optical profilometry, phase changes on reflection
In the article describes influence of phase changes on reflection (PCOR) on measurement of a profile of a surface. The measurement of the profile of a surface was held with help of scanning white light interference microscope and coherent interference microscope of phase shift. Represented results of thickness measurement of aluminum covering, evaporated on a silicon plate without changes correction, which connected with effect of phase changes, with correction, calculated by the handbook data and calculated by ellipsometric measurements. The obtained data compares with atomic-force microscope measurements.
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