High Aspect Ratio Microstructure Coupler Concept

M.D. Schaffer and D.M. Klymyshyn (Canada)


RF Coupler, RF Circuit Components, RF MEMS,Microstructure, LIGA, Lumped Elements, TransmissionLines


A new 5.4 GHz lumped quadrature coupler microstructure is described. The microstructure is derived from the lumped element equivalent circuit of a distributed quadrature coupler. High aspect ratio vertically orientated structures are proposed as the lumped elements. The coupler is simulated using electromagnetic finite element software. Increased capacitance of vertical high aspect ratio structures results in a compact microstructure coupler that is smaller in size than existing distributed quadrature couplers.

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