Integrated Micro-Coaxial Passive Components for Millimeter-Wave Antenna Front Ends

K. Vanhille, M. Lukic, S. Rondineau, D. Filipovic, and Z. Popovic (USA)

Keywords

Coaxial cables, millimetrewaves, directional coupler, low loss, microfabrication, waferscale integration.

Abstract

Miniature 250 to 700-μm tall copper air-filled rectangular coaxial line with inner conductor supported by periodic dielectric straps is demonstrated. The measured loss is as low as 0.08dB/cm at 37GHz, while the isolation between two parallel lines with center-to-center separation of 350μm is better than 60dB. A number of quasi-planar components are designed to be fabricated on the same 6 inch wafer using a sequential micro-fabrication process with 5 to 10 layers of copper. This paper presents an overview of several components that have been demonstrated in the air-micro-coax technology: low-loss densely-packed lines with a range of characteristic impedances; patch-type antenna elements; branch-line hybrids; cavity resonators; a Buttler matrix beamforming network. In addition to these components, the paper also discusses dividers/combiners and broadband hybrids, with an overview of the limitations and advantages of the technology.

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