Operator Level Software of the Silicon Single Crystal Furnace

A.N. Bevzov, A.V. Kurochkin, and S.V. Okunishnikov (Russia)

Keywords

Software, automation, GUI, Silicon

Abstract

Functional assignment, composition and main design principles of the operator level software of automated furnace for growing Silicon single crystals are presented.

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• DOI:
• From Proceeding (483) ACIT - Automation, Control, and Applications - 2005

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