Technological Support Software for Silicon Single Crystal Growing Process

I.I. Bezshteinov, K.I. Budnikov, and S.V. Okunishnikov (Russia)


Automation, Control application, Software


Silicon single crystal growing process has empirical character now and in a great extent is determined by technologist or production engineer. Success of his actions depends on information completeness about process and capability to affect on it. Technological support software for "Kedr" crystal growing furnaces equipped by "Sibiryachka" control units is described in the paper.

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