Limiting Characterization of Fresnel Measuring Method

Y.V. Chugui, N.A. Yakovenko, and M.D. Yaluplin (Russia)


Optical measurements, dimensional metrology, Fresneldiffraction, accuracy


The limiting characterization of a Fresnel method for measurement of objects dimensions in coherent light is investigated. Free space being an optical element transforms the input image of the object into its Fresnel image with high accuracy. Effective correcting algorithm to increase accuracy for lower measurement range is proposed. Capabilities of diverging spherical light wave for matching the characteristic geometric parameters of Fresnel diffraction image with resolution and length of CCD arrays is investigated. It allows increasing measurement accuracy and creating compact measuring gauges.

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