V.I. Kozik and E.S. Nejevenko (Russia)
Crystal growing, meniscus, sensor, diameter, calibration
In the report the problem of the monitoring of a monocrystal diameter during growing by Czochralski technique is investigated. The image of a meniscus, where crystallization takes place is analyzed. Informative parameters on which it is possible to estimate diameter of a crystal are determined. The algorithm of definition of a meniscus diameter at various stages of the growth, using for regulation of a crystal diameter by change of growth parameters is described. The results of operation of the sensor using developed algorithm at growing of real crystals are represented.
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