Differential Method of Instrument Resolution Enhancement

G.L. Kuryshev and V.G. Polovinkin (Russia)

Keywords

Signal Processing, Applications, Resolution Enhancement, Interface State Density

Abstract

A simple method for solving the integral equation of convolution type is proposed. The method is based on representation of the solving procedure as a series of differential operators. Discussion is based on the problem of determining the density of interface states of Metal Insulator-Semiconductor (MIS) structures from high frequency or quasi static Capacitance Voltage characteristics. The dependence of the obtained energy resolution on the number of the series terms taken into account and the required accuracy of the original data are discussed.

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