A Control System Architecture for a Single Crystal Growing Furnace

А. A. Lubkov, V.E. Zyubin, A.V. Kurochkin, and K.I. Budnikov (Russia)


Batch control, critical process, integrated automation


The Paper presents an implementation of a distributed control system for a furnace used to grow silicon single crystals with a diameter of up to 250 mm by pulling from silicon melt. The main principles and engineering solutions used in the hardware and software design process of the control system are discussed.

Important Links:

Go Back