Non-contacting CMOS Readout Circuit for an Array of Electrostatically Levitated Infrared Sensors

S.N. Chanderkar, M.L. Reed, and T.N. Blalock (USA)

Keywords

Bolometer, CMOS, sensors, oscillator, phase noise

Abstract

This paper introduces a technique to accomplish readout of an infrared detector via capacitive coupling of an oscillator without direct DC contact between the sensor and electrodes. Avoiding direct physical contact between the infrared detector and the readout electrodes minimizes thermal conduction losses, providing a more accurate and sensitive measurement of the infrared power incident on the sensor. An analog CMOS voltage controlled oscillator with an oscillation frequency of 79 MHz and phase noise of 104 dBc/Hz @ 1 KHz offset is discussed and investigated as the non-contacting readout circuit.

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