I. Siebar and K.-H. Suphan (Germany)
Physically-based modeling, simulation optimization, applications, optics simulation
Manufacturing test structures of microsensors and microactuators is very expensive in terms of time and materials. In a conventional design process, this limits the number of design variants to be considered. For this reason, computer-supported design techniques are becoming increasingly important in microsystems technologies. The modular structure of hybrid systems requires single components to be manufactured separately and later combined into one total system. Combining single components into one overall system is bound to be subject to certain tolerances. The concept presented in this paper is the computer- aided design of a modular system rugged enough to be employed in mass fabrication. In mass fabrication, it is not the ideal arrangement of individual components which results in the most effective system. Instead, tolerances in positioning individual optical elements need to be taken into account in modeling already.
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