Jin-Ho Yeo, Sung-Gap Lee, Hye-Rin Jung, Ye-Won Jo
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Anodic Aluminum Oxide, capacitive EIS, Biosensor.
In this study, we fabricated electrolyte-dielectric-
metal(EDM) device incorporating a high-k Al2O3 sensing
membrane through porous anodic aluminum oxide (AAO)
by two step anodizing process for pH detection. To
change the characters of the AAO template, the
crystallizing time was varied from 0 hour to 10 hours at
C. The structural properties were observed by field
emission scanning electron microscopy (FE-SEM). The
pH sensitivity increased in the crystallizing time from 0
hour to 2 hours and gradually saturated at 5 hours or more.
The porous AAO sensor with the crystallizing
temperature of 10 hours showed the good sensitivity and
long-term stability were 54.1 mV/pH, 2.4mV/h,